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| MLX90210 Pressure Sensor IC Features and Benefits 0 -1.0 Bar Range Compact Design High Long Term Stability Low Cost Applications Medical Instrumentation (Blood Pressure) Consumer Appliances Sports Equipment Pressure Difference and Flow monitoring Ordering Information Part No. MLX90210 MLX90210 Temperature Suffix C C Package CA UD Temperature Range -0C to 70C Commercial -0C to 70C Commercial Functional Diagram Description The MLX90210 is a discrete micromachined pressure sensor IC suitable for pressure ranges between 0 to 1.0 Bar. The pressure medium must be dry and non-corrosive, such as air. The 90210 is packaged in a plastic/ceramic package, (CA) or can be ordered as unpackaged die (UD) The principal of the circuit is a piezoresistive bridge which is realized in silicon through a special micromachine process. As pressure is applied to the bridge, a differential voltage change is seen across the VOUT pins, while a bias voltage is applied to the VEXC pins. The MLX90210 is a versatile pressure sensor solution which can be directly interfaced with other Melexis ICs such as the MLX90308, which provides amplification, signal conditioning as well as the bias current to supply the sensor itself. 1 VEXC+ 2 VOUT+ 15 VEXC- 16 VOUT- MLX902xx Name of Sensor MLX90210 Pressure Sensor IC Rev Y.X 1 Page 22/Aug/98 1.0 Rev Page 1 12/January/01 MLX90210 Pressure Sensor IC MLX90210 Electrical Specifications DC Operating Parameters TA = 25C, VDD = 5V (note 3), Pressure = 1.0 Bar full scale. Parameter Min Typ Excitation voltage Zero Pressure Offset Sensitivity TC of the Sensitivity (1) Bridge Resistance Burst pressure Operating Temp Storage Temp (2) 0 -55 VOFF S TC S RBR 0 -30 14 -0.17 12 5 0 22 -0.001 14 Max 12 +30 30 -0.26 16 2 70 150 Units V mV mV/V/bar C -1 kOhm Bar C C MLX90210 Mechanical Dimensions (4) Membrane Size Chip Thickness Chip Size 0.81mm X 0.81mm 0.61mm 1.90mm X 1.90mm Notes: 1) 2) 3) 4) Temperature range refers to operation and deposit in an inert environment Temperature range refers to operation and depos it in an inert environment To prevent measurement errors, measure above 3V VDD in impulse mode Tolerance of 10% unless otherwise specified. MLX90210 Pressure Sensor IC Page 2 Rev 1.0 12/January/01 MLX90210 Pressure Sensor IC "CA" Package Dimensions Top view Bottom view 0.170 diam 0.030 0.030 2 1 16 15 8 9 0.300 diam 0.028 0.300 0.085 0.060 Cross section 0.340 Note: 1) All dimensions in inches. For the latest version of this document, Go to our website at: 0.025 0.122 France Melexis France Tour Arago, 5 rue Bellini, 92806 Puteaux -La-Defense, France. Phone: +33 1 47 78 11 34 Fax: +33 1 47 78 06 35 E-mail: sales_france@melexis.com www.melexis.com Or for additional information contact Melexis Direct: USA Melexis Inc. 41 Locke Road, Concord, NH 03301 Phone: +1 603 223 2362 E-mail: sales_usa@melexi s.com Fax: +1 603 223 9614 Italy Dimacred IRL Via Papa Giovanni XXIII no. 25, 20046 Biassono, Italy Phone: +39 039 249 4856 Fax: +39 039 491773 E-mail: sales_italy@melexis.com United Kingdom Silicon Concepts PCB Lynchborough Road, Hampshire GU30 7SB, United Kingdom Phone: +44 1428 751 617 Fax: +44 1428 751 603 E-mail: sales_uk@melexis.com Japan Satori Electric Co., LTD 1-14-10 Shiba, Minato-Ku, Tokyo, Japan Phone: +81 3 3452 7171 Fax: +81 3 3769 2197 E-mail: sales_japan@melexis.com Germany Am Seestern 8, 40547 Dusseldorf, Germany Phone: +49 211 5360212 Fax: +49 211 5360250 E-mail: sales_de@melexis.com Taiwan Beechwood Int'l Taiwan Co. Room 8, 17F, No. 189, Taipei, Taiwan Phone: +886 2 2739 3322 E-mail: sales_taiwan@melexis.com Fax: +886 2 2739 3090 MLX902xx Name of Sensor MLX90210 Pressure Sensor IC Rev Y.X 3 Page 22/Aug/98 1.0 Rev 0.075 Page 3 12/January/01 0.050 diam 0.08 0.250 sq |
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